Substrate temperature-dependant properties of HMGZO thin films deposited by DC magnetron sputtering

被引：0
|
作者：
Liu, Jie-Ming [1 ]
Chen, Xin-Liang [1 ]
Tian, Cong-Sheng [1 ]
Liang, Jun-Hui [1 ]
Zhang, De-Kun [1 ]
Zhao, Ying [1 ]
Zhang, Xiao-Dan [1 ]
机构：
[1] Tianjin Key Laboratory on Photoelectronic Thin Film Devices and Technology, Institute of Photo-electronic Thin Film Devices and Technology, Nankai University, Tianjin , China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2014年 / 25卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2114 / 2122
相关论文
共 50 条
  • [1] Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering
    Zhang Chi
    Chen Xin-Liang
    Wang Fei
    Yan Cong-Bo
    Huang Qian
    Zhao Ying
    Zhang Xiao-Dan
    Geng Xin-Hua
    ACTA PHYSICA SINICA, 2012, 61 (23)
  • [2] Influence of substrate temperature on structural and optical properties of ZnCdO thin films deposited by dc magnetron sputtering
    Sui, Y. R.
    Yue, Y. G.
    Cao, Y.
    Yao, B.
    Liu, X. Y.
    Lang, J. H.
    Gao, M.
    Li, X. F.
    Li, X. Y.
    Yang, J. H.
    CERAMICS INTERNATIONAL, 2014, 40 (07) : 9189 - 9194
  • [3] Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering
    Fu, EG
    Zhuang, DM
    Zhang, G
    Yang, WF
    Zhao, M
    APPLIED SURFACE SCIENCE, 2003, 217 (1-4) : 88 - 94
  • [4] Properties of titanium thin films deposited by dc magnetron sputtering
    Jeyachandran, Y. L.
    Karunagaran, B.
    Narayandass, Sa. K.
    Mangalaraj, D.
    Jenkins, T. E.
    Martin, P. J.
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2006, 431 (1-2): : 277 - 284
  • [5] Effect of Substrate Temperature on Optical Properties of Aluminum Zinc Oxide Thin Films Deposited by DC Magnetron Sputtering
    Kumar, B. Rajesh
    Rao, T. Subba
    OPTICS: PHENOMENA, MATERIALS, DEVICES, AND CHARACTERIZATION: OPTICS 2011: INTERNATIONAL CONFERENCE ON LIGHT, 2011, 1391
  • [6] Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature
    Terzini, E
    Thilakan, P
    Minarini, C
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 77 (01): : 110 - 114
  • [7] The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering
    Yeon-Keon Moon
    Se-Hyun Kim
    Jong-Wan Park
    Journal of Materials Science: Materials in Electronics, 2006, 17 : 973 - 977
  • [8] The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering
    Moon, Yeon-Keon
    Kim, Se-Hyun
    Park, Jong-Wan
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2006, 17 (12) : 973 - 977
  • [9] Properties of PET/ITO Thin Films Deposited by DC Magnetron Sputtering
    ZHANG Xing
    SemiconductorPhotonicsandTechnology, 2010, 16 (01) : 35 - 41
  • [10] Photoelectric properties of ITO thin films deposited by DC magnetron sputtering
    柳伟
    程树英
    半导体学报, 2011, 32 (01) : 17 - 20
12345