Evolution of micro- and substructure parameters of TiN films applied by reactive CFUBMS on steel substrates

被引：0
|
作者：
Department of Solid State Physics and Microelectronics, Faculty of Physics, University of Sofia, Sofia, Bulgaria [1 ]
不详 [2 ]
不详 [3 ]
机构：
来源：
Galvanotechnik | 2008年 / 99卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
15
引用
收藏
页码：956 / 964
相关论文
共 50 条
  • [31] THE ROLE OF TIN IN THE FORMATION OF MICRO- AND NANO-STRUCTURED SURFACES OF LAYERED Si-Sn-Si FILMS
    Neimash, V. B.
    Shepelyavyi, P. E.
    Nikolenko, A. S.
    Strelchuk, V. V.
    Chegel, V. I.
    Olkhovyk, I. V.
    Voronov, S. O.
    UKRAINIAN JOURNAL OF PHYSICS, 2023, 68 (04): : 284 - 291
  • [32] Monolayer Graphene Grown on Nanoscale Pt Films Deposited on TiO2 Substrates for Micro- and Nanoelectromechanical Systems
    Cho, Joon Hyong
    Seo, Yoonho
    Dolocan, Andrei
    Hall, Neal A.
    Cullinan, Michael A.
    ACS APPLIED NANO MATERIALS, 2020, 3 (10): : 9731 - 9739
  • [33] Investigation of texture and residual stresses in reactive magnetron sputtered TiN coatings on M2 steel substrates
    Mirchev, R.
    Iordanova, L.
    Antonov, V.
    Kelly, P. J.
    SIX INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION, 2007, 899 : 631 - 631
  • [34] Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example
    Smirnov, D. I.
    Giniyatyllin, R. M.
    Zyul'kov, I. Yu
    Medetov, N. A.
    Gerasimenko, N. N.
    TECHNICAL PHYSICS LETTERS, 2013, 39 (07) : 640 - 643
  • [35] Problems in measurements of parameters of elements and structures in modern micro- and nanoelectronics considering TiN/Ti diffusion barrier structures as an example
    D. I. Smirnov
    R. M. Giniyatyllin
    I. Yu. Zyul’kov
    N. A. Medetov
    N. N. Gerasimenko
    Technical Physics Letters, 2013, 39 : 640 - 643
  • [36] The effects of MEVVA ion implantation on the tribological properties of PVD-TiN films deposited on steel substrates
    Manory, RR
    Mollica, S
    Ward, L
    Purushotham, KP
    Evans, P
    Noorman, J
    Perry, AJ
    SURFACE & COATINGS TECHNOLOGY, 2002, 155 (2-3): : 136 - 140
  • [37] Micro- and nano-thermal analysis applied to multi-layered biaxially-oriented polypropylene films
    Gotzen, N. A.
    Van Assche, G.
    Ghanem, A.
    Van Ingelgem, Y.
    Hubin, A.
    Van Mele, B.
    JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY, 2009, 95 (01) : 207 - 213
  • [38] Micro- and nano-thermal analysis applied to multi-layered biaxially-oriented polypropylene films
    N. A. Gotzen
    G. Van Assche
    A. Ghanem
    Y. Van Ingelgem
    A. Hubin
    B. Van Mele
    Journal of Thermal Analysis and Calorimetry, 2009, 95 : 207 - 213
  • [39] Reactive μCP on ultrathin block copolymer films:: Localized chemistry for micro- and nano-scale biomolecular patterning
    Feng, Chuan Liang
    Embrechts, Anika
    Vancso, G. Julius
    Schonherr, Holger
    EUROPEAN POLYMER JOURNAL, 2006, 42 (09) : 1954 - 1965
  • [40] In-situ characterization of the damage evolution in thin polyelectrolyte films on TWIP steel substrates
    Niendorf, T.
    Brenne, F.
    Liu, C.
    Ozcan, O.
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2013, 566 : 82 - 89
12345