Non-destructive analysis of buried interfaces and surface layers: X-ray emission spectroscopic study

被引:0
|
作者
Iwami, Motohiro [1 ]
Hirai, Masaaki [1 ]
Kusaka, Masahiko [1 ]
Morii, Takashi [2 ]
机构
[1] Research Laboratory for Surface Sci., Faculty of Science, Okayama University, Okayama 700-8530, Japan
[2] RIBMC Ltd., Tsukuba 305-0853, Japan
关键词
D O I
10.1143/jjap.42.4756
中图分类号
学科分类号
摘要
Interfaces (materials)
引用
收藏
页码:4756 / 4759
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