Formulation of a viscoelastic stress problem using analytical integration and its application to viscoelastic oxidation simulation

被引：0

作者：

Uchida, Tetsuya ^{[1
]}

Nishi, Kenji ^{[1
]}

机构：

[1] Advanced Technology Research Dept., Semicon. Leading Edge Technol. Inc., 292 Yoshida, Totsuka, Yokohama 244-0817, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 12期

关键词：

D O I：

10.1143/jjap.40.6711

中图分类号：

学科分类号：

摘要：

引用

页码：6711 / 6719

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