Focused ion beam machining for optical microlens fabrication

被引：0
|
作者：
Kitamura, Masaru [1 ]
Koike, Eijiro [1 ]
Takasu, Noburu [1 ]
Nishimura, Tetsuro [1 ]
机构：
[1] Corporate Mft. Engineering Center, Toshiba Corporation, 33, Shin-isogo-cho, Isogo-ku, Yokoyama 235-0017, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 A期
关键词：
D O I：
10.1143/jjap.41.4019
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：4019 / 4021
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