Focused ion beam machining for optical microlens fabrication

被引：0
|
作者：
Kitamura, Masaru [1 ]
Koike, Eijiro [1 ]
Takasu, Noburu [1 ]
Nishimura, Tetsuro [1 ]
机构：
[1] Corporate Mft. Engineering Center, Toshiba Corporation, 33, Shin-isogo-cho, Isogo-ku, Yokoyama 235-0017, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 A期
关键词：
D O I：
10.1143/jjap.41.4019
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：4019 / 4021
相关论文
共 50 条
  • [1] Focused ion beam machining for optical microlens fabrication
    Kitamura, M
    Koike, E
    Takasu, N
    Nishimura, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (6A): : 4019 - 4021
  • [2] Fabrication of a side aligned optical fibre interferometer by focused ion beam machining
    Sun, J.
    Li, J.
    Maier, R. R. J.
    Hand, D. P.
    MacPherson, W. N.
    Miller, M. K.
    Ritchie, J. M.
    Luo, X.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (10)
  • [3] Focused ion beam machining of silicon
    Hung, NP
    Fu, YQ
    Ali, MY
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2002, 127 (02) : 256 - 260
  • [4] Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators
    Joe, Hang-Eun
    Park, Jae-Hyeong
    Kim, Seong Hyeon
    Kim, Gyuho
    Jun, Martin B. G.
    Min, Byung-Kwon
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (09)
  • [5] Ion beam, focused ion beam, and plasma discharge machining
    Allen, D. M.
    Shore, P.
    Evans, R. W.
    Fanara, C.
    O'Brien, W.
    Marson, S.
    O'Neill, W.
    CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2009, 58 (02) : 647 - 662
  • [6] Microfabrication of microlens array by focused ion beam technology
    Fu, YQ
    Kok, N
    Bryan, A
    MICROELECTRONIC ENGINEERING, 2000, 54 (3-4) : 211 - 221
  • [7] Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining
    Lehrer, C
    Frey, L
    Petersen, S
    Sulzbach, T
    Ohlsson, O
    Dziomba, T
    Danzebrink, HU
    Ryssel, H
    MICROELECTRONIC ENGINEERING, 2001, 57-8 : 721 - 728
  • [8] Machining Simulation in Focused Ion Beam Sputtering
    Matsumura, Takashi
    Ogasawara, Ryosuke
    JOURNAL OF MICRO AND NANO-MANUFACTURING, 2020, 8 (02):
  • [9] Focused ion beam machining and deposition for nanofabrication
    Davies, ST
    Khamsehpour, B
    VACUUM, 1996, 47 (05) : 455 - 462
  • [10] Investigation of microlens mold fabricated by focused ion beam technology
    Fu, Y
    MICROELECTRONIC ENGINEERING, 2001, 56 (3-4) : 333 - 338
12345