Chemical vapor deposition of cobalt using novel cobalt(I) precursors

被引：0
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作者：
Choi, Hyungsoo [1 ]
Park, Sungho [1 ]
Jang, Ho G. [1 ]
机构：
[1] Beckman Inst. for Adv. Sci./Technol., University of Illinois at UC, 405 North Mathews Avenue, Urbana, IL 61801, United States
来源：
| 2002年 / Materials Research Society卷 / 17期
关键词：
This work was supported by the National Science Foundation under Grant No. CHE-9973575. S. Park was supported by the Office of Naval Research and CRM-KOSEF (2001). We thank the Center for Microanalysis of Materials of Frederick Seitz Materials Research Laboratory at University of Illinois at Urbana-Champaign for the use of SEM and XPS;
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