Process optimization for synthesis of high-quality graphene films by low-pressure chemical vapor deposition

被引：0
|
作者：
Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk 790-784, Korea, Republic of [1 ]
机构：
来源：
Jpn. J. Appl. Phys. | / 6 PART 2卷
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Low pressure chemical vapor deposition
引用
下载
收藏
相关论文
共 50 条
  • [41] Synthesis of hexagonal boron nitride films on silicon and sapphire substrates by low-pressure chemical vapor deposition
    Singhal, Ranjan
    Echeverria, Elena
    McIlroy, David N.
    Singh, Raj N.
    THIN SOLID FILMS, 2021, 733
  • [42] Synthesis of hexagonal boron nitride films by dual temperature zone low-pressure chemical vapor deposition
    朱志甫
    王少堂
    邹继军
    黄河
    孙志嘉
    修青磊
    张忠铭
    岳秀萍
    张洋
    瞿金辉
    甘勇
    Chinese Physics B, 2022, 31 (08) : 446 - 450
  • [43] Synthesis of hexagonal boron nitride films by dual temperature zone low-pressure chemical vapor deposition
    Zhu, Zhi-Fu
    Wang, Shao-Tang
    Zou, Ji-Jun
    Huang, He
    Sun, Zhi-Jia
    Xiu, Qing-Lei
    Zhang, Zhong-Ming
    Yue, Xiu-Ping
    Zhang, Yang
    Qu, Jin-Hui
    Gan, Yong
    CHINESE PHYSICS B, 2022, 31 (08)
  • [44] Toward high-quality graphene film growth by chemical vapor deposition system
    Choi, Myungwoo
    Baek, Jinwook
    Zeng, Haibo
    Jin, Sunghwan
    Jeon, Seokwoo
    CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 2024, 31
  • [45] Synthesis of Graphene by Low Pressure Chemical Vapor Deposition (LPCVD) Method
    Khan, Sunny
    Ali, Javid
    Harsh
    Husain, M.
    Zulfequar, M.
    RECENT TRENDS IN MATERIALS AND DEVICES, ICRTMD 2015, 2017, 178 : 119 - 123
  • [46] Optical and structural properties of high-quality ZnS epitaxial layers grown on GaAs substrates by low-pressure metalorganic chemical vapor deposition
    Nakamura, S
    Takagimoto, S
    Ando, T
    Kugimiya, H
    Yamada, Y
    Taguchi, T
    JOURNAL OF CRYSTAL GROWTH, 2000, 221 (1-4) : 388 - 392
  • [47] High-quality ZnO films grown by atmospheric pressure metal-organic chemical vapor deposition
    Wang, L
    Pu, Y
    Fang, WQ
    Dai, JN
    Chen, YF
    Mo, CL
    Jiang, FY
    JOURNAL OF CRYSTAL GROWTH, 2005, 283 (1-2) : 87 - 92
  • [48] High-quality GaN films grown on chemical vapor-deposited graphene films
    Kunook Chung
    Suk In Park
    Hyeonjun Baek
    Jin-Seok Chung
    Gyu-Chul Yi
    NPG Asia Materials, 2012, 4 : e24 - e24
  • [49] High-quality GaN films grown on chemical vapor-deposited graphene films
    Chung, Kunook
    Park, Suk In
    Baek, Hyeonjun
    Chung, Jin-Seok
    Yi, Gyu-Chul
    NPG ASIA MATERIALS, 2012, 4 : e24 - e24
  • [50] High-quality AlN films grown on chemical vapor-deposited graphene films
    Chen, Bin-Hao
    Hsu, Hsiu-Hao
    Lin, David T. W.
    2016 3RD INTERNATIONAL CONFERENCE ON CHEMICAL AND BIOLOGICAL SCIENCES, 2016, 60
12345