A user-friendly, high-sensitivity strain gauge

被引：0
|
作者：
Nagy, Michael L. [1 ]
Apanius, Christopher [1 ]
Siekkinen, James W. [1 ]
Estrada, Horacio V. [1 ]
机构：
[1] BFGoodrich Advanced Micro Machines, 11000 Cedar Ave., Cleveland, OH 44107, United States
来源：
Sensors (Peterborough, NH) | 2001年 / 18卷 / 06期
关键词：
Microelectromechanical devices - Photolithography - Polyimides - Residual stresses - Silicon - Temperature - Thermal expansion - Ultrasonic applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A silicon strain gauge as easy to handle and use as a metal foil gauge was demonstrated to have gauge factors as high as 110, a 0.06 in. bend radius, integrated solder pads, and compatibility with conventional mounting methods. Additional benefits include relatively low-cost manufacture and direct integration with flex circuitry.
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页码：22 / 24
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