Microstructure and electrical properties of (Ba,Sr)TiO3 thin films prepared by a sol-gel method

被引：0

作者：

Ren, Tian-Ling ^{[1
]}

Wang, Xiao-Ning ^{[1
]}

Liu, Jian-She ^{[1
]}

Zhao, Hong-Jin ^{[1
]}

Shao, Tian-Qi ^{[1
]}

Liu, Li-Tian ^{[1
]}

Li, Zhi-Jian ^{[1
]}

机构：

[1] Institute of Microelectronics, Tsinghua University, Beijing 100084, China

来源：

Integrated Ferroelectrics | 2002年 / 45卷

关键词：

Atomic force microscopy - Electric properties - Microstructure - Permittivity - Rapid thermal annealing - Silicon - Sol-gels - Titanium compounds - X ray diffraction;

D O I：

10.1080/713718221

中图分类号：

学科分类号：

摘要：

Silicon-based BaxSr1-xTiO3 (BST) thin films have been prepared by a Sol-Gel method with rapid thermal annealing (RTA) processes. Phase structure of the films has been investigated by X-ray diffraction (XRD). Atomic force microscopy (AFM) studies reveal a smooth, dense and crack-free surface of the BST films. Microstructure and electrical properties of the BST films can be affected by the substrate and the annealing process. RTA method is found to be very efficient to improve the electrical properties of the films. Dielectric constant and dielectric loss of the BST films at 100 KHz are 230 and 0.02, respectively. Leakage current density of the BST capacitors is 1.6×10-7A/cm2 at 3V. © 2002 Taylor & Francis.

引用

页码：13 / 21

共 50 条

[41] Influences of annealing temperature on the optical and structural properties of (Ba,Sr)TiO3 thin films derived from sol-gel technique
Tian, HY
Luo, WG
Ding, AL
Choi, JW
Lee, C
No, K
THIN SOLID FILMS, 2002, 408 (1-2) : 200 - 205
[42] Characterization and electrical properties of sol-gel synthesized (Sr, Pb)TiO3 powders
Zhao, JC
Li, LT
Wang, YL
Gui, ZL
JOURNAL OF MATERIALS SCIENCE, 2004, 39 (05) : 1785 - 1788
[43] Characterization and electrical properties of sol-gel synthesized (Sr, Pb)TiO3 powders
Jingchang Zhao
Longtu Li
Yongli Wang
Zhilun Gui
Journal of Materials Science, 2004, 39 : 1785 - 1788
[44] Fabrication and characterisation of (Ba,Sr)TiO3 thin films by sol-gel technique through organic precursor route
Giridharan, NV
Varatharajan, R
Jayavel, R
Ramasamy, P
MATERIALS CHEMISTRY AND PHYSICS, 2000, 65 (03) : 261 - 265
[45] Sol-gel synthesis and electrical characterization of (Pb,Ca)TiO3 thin films
Chewasatn, S
Milne, SJ
JOURNAL OF MATERIALS SCIENCE, 1997, 32 (03) : 575 - 582
[46] The effect of annealing temperature on the microstructure, surface morphology and compositions of Ba0.5Sr0.5TiO3 thin films prepared by the sol-gel method
Dewi, Rahmi
Ibrahim, Noor Baa'yah
Abu Talib, Ibrahim
SAINS MALAYSIANA, 2008, 37 (01): : 85 - 88
[47] Orientation-dependent microwave dielectric properties of Ba0.6Sr0.4TiO3 thin films prepared by sol-gel method
Wang, Hui
Bian, Yanlong
Zhai, Jiwei
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2013, 24 (07) : 2362 - 2366
[48] Microstructure and electrical properties Of PMNT thin films prepared by a modified sol-gel process
Liu, Aiyun
Han, Hailong
Wei, Linlin
Wang, Peng
Lin, Fangting
Shi, Wangzhou
Meng, Xiangjian
Sun, Jinglan
Chu, Junhao
Jing, Chengbin
EIGHTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2013, 9068
[49] Dielectric properties and leakage current of MgO/(Ba0.8Sr0.2)TiO3 heterostructured films prepared by sol-gel technique
Jia, JF
Huang, K
Pan, QT
Li, SG
He, DY
ACTA PHYSICA SINICA, 2006, 55 (04) : 2069 - 2072
[50] Fabrication of ferroelectric (Pb,Ba) TiO3 thin films by sol-gel technique and their characterization
Giridharan, NV
Jayavel, R
MATERIALS LETTERS, 2002, 52 (1-2) : 57 - 61

← 1 2 3 4 5 →