Preparation and etching of silicon-based piezoelectric thin films for integrated devices

被引：0
|
作者：
Zhao, Hong-Jin [1 ]
Ren, Tian-Ling [1 ]
Zhang, Lin-Tao [1 ]
Liu, Jian-She [1 ]
Liu, Li-Tian [1 ]
Li, Zhi-Jian [1 ]
机构：
[1] Institute of Microelectronics, Tsinghua University, Beijing 100084, China
来源：
Integrated Ferroelectrics | 2002年 / 48卷
关键词：
Integration processes - PZT thin films - Semiconductor lithographic process - ZnO thin films;
D O I：
10.1080/713718312
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：271 / 279
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