Characteristics of (Ba,Sr)TiO3 capacitors with textured Ru bottom electrode

被引：0
|
作者：
Aoyama, Tomonori [1 ]
Yamazaki, Soichi [1 ]
Imai, Keitaro [1 ]
机构：
[1] Proc. and Mfg. Engineering Center, Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 11期
关键词：
D O I：
10.1143/jjap.39.6348
中图分类号：
学科分类号：
摘要：
15
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收藏
页码：6348 / 6357
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