Application of phase shift interferometry to the measurement of small angle and linearity

被引：0
|
作者：
Wang, Quan-Dou
Yu, Jing-Chi
Zhang, Zhong-Yu
Zhang, Xue-Jun
机构：
来源：
Jiliang Xuebao/Acta Metrologica Sinica | 2002年 / 23卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Factors affecting temperature measurement using phase measurement interferometry in small scale devices
    Walsh, P. A.
    Davies, M. R. D.
    EXPERIMENTAL THERMAL AND FLUID SCIENCE, 2006, 30 (08) : 853 - 862
  • [22] Accuracy improvement of phase shift interferometry
    Moon, KS
    Wang, YD
    OPTOMECHATRONIC SYSTEMS IV, 2003, 5264 : 312 - 321
  • [23] Phase-shift-amplified interferometry
    Ben Ayun, Moshe
    Liokumovitch, Egor
    Gotliv, Daniel
    Sternklar, Shmuel
    OPTICS LETTERS, 2018, 43 (10) : 2402 - 2405
  • [24] Small roll angle measurement using lateral shearing cyclic path polarization interferometry
    Kumar, Y. Pavan
    Chatterjee, Sanjib
    Negi, Sarvendra Singh
    APPLIED OPTICS, 2016, 55 (05) : 979 - 983
  • [25] Full-field refractive index measurement with simultaneous phase-shift interferometry
    Chu, Yen-Chang
    Chang, Wei-Yao
    Chen, Kun-Huang
    Chen, Jing-Heng
    Tsai, Bo-Chung
    Hsu, Ken Y.
    OPTIK, 2014, 125 (13): : 3307 - 3310
  • [26] Direct growth rate measurement of hydroxyapatite single crystal by Moire phase shift interferometry
    Kanzaki, N
    Onuma, K
    Ito, A
    Teraoka, K
    Tateishi, T
    Tsutsumi, S
    JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (34): : 6471 - 6476
  • [27] Transient vibration measurement of an ultrasonic motor using stroboscopic phase-shift interferometry
    Nishikura, Y
    Torii, A
    Ueda, A
    Hane, K
    MHS '98, PROCEEDINGS OF THE 1998 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 1998, : 225 - 230
  • [28] Measurement of fine surface profile with two-wavelength phase-shift interferometry
    Nishikawa, Takayuki
    Takayasu, Takurou
    Iwata, Koichi
    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 1991, 57 (09): : 1633 - 1638
  • [29] Application of microscopic interferometry for quantitative phase measurement of red blood cells
    Xue L.
    Lai J.
    Wang S.
    Li Z.
    Guangxue Xuebao/Acta Optica Sinica, 2010, 30 (12): : 3563 - 3567
  • [30] OBJECT ILLUMINATION ANGLE MEASUREMENT IN SPECKLE INTERFEROMETRY
    NG, TW
    CHAU, FS
    APPLIED OPTICS, 1994, 33 (25): : 5959 - 5961
12345