Semiconductor piezoresistance prediction model for mechanical sensor design

被引：0
|
作者：
Nakanishi, Ryo [1 ]
Morikawa, Ryo [1 ]
Kawai, Masashi [1 ]
Nakahara, Takumi [1 ]
Toriyama, Toshiyuki [1 ]
机构：
[1] College of Science and Engineering, Ritsumeikan University, Kusatsu, Japan
来源：
Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi) | 2023年 / 216卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Giant geometrically amplified piezoresistance in metal-semiconductor hybrid resistors
    Hansen, Ole
    Reck, Kasper
    Thomsen, Erik V.
    JOURNAL OF APPLIED PHYSICS, 2008, 104 (11)
  • [22] Review: Numerical Simulations of Semiconductor Piezoresistance for Computer-Aided Designs
    Sugiura, Takaya
    Matsuda, Kazunori
    Nakano, Nobuhiko
    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2023, 11 : 325 - 336
  • [23] A novel theoretical model for semiconductor oxide gas sensor
    Shukla, S
    Seal, S
    Semiconductor Materials for Sensing, 2005, 828 : 161 - 166
  • [24] The empirical verification of the FEM model of semiconductor pressure sensor
    Pancewicz, T
    Jachowicz, R
    Gniazdowski, Z
    Azgin, Z
    Kowalski, P
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) : 260 - 265
  • [25] Development of low-power semiconductor strain sensor for mechanical sensor-net sysems
    Ohta, Hiroyuki
    Sumigawa, Takashi
    Shimazu, Hiromi
    Tanno, Youhei
    Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 2007, 73 (05): : 666 - 671
  • [26] Study on the temperature compensation method of piezoresistance silicon sensor of accelerometer
    Zhang, BZ
    Zhang, WD
    Guo, T
    Zhou, ZL
    Wang, HY
    ISTM/2005: 6th International Symposium on Test and Measurement, Vols 1-9, Conference Proceedings, 2005, : 137 - 139
  • [27] The study on the temperature compensation method of piezoresistance silicon film sensor
    Guo, T
    Shi, YB
    Zhang, WD
    ISTM/2003: 5TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, CONFERENCE PROCEEDINGS, 2003, : 2368 - 2370
  • [28] The Design of Metal-Semiconductor-Metal Structure Magnetic sensor
    Sutthinet, Chalin
    Phetchakul, Toempong
    Luanatikomkul, Wittaya
    Poyai, Amporn
    2016 INTERNATIONAL ELECTRICAL ENGINEERING CONGRESS, IEECON2016, 2016, : 148 - 151
  • [29] Design of a novel semiconductor laser-based chemical sensor
    Ten, S
    Fallahi, M
    Peyghambarian, N
    ELECTRO-OPTICAL TECHNOLOGY FOR REMOTE CHEMICAL DETECTION AND IDENTIFICATION, 1996, 2763 : 64 - 69
  • [30] Prediction model of mechanical loss in turbocharger
    Sakagami, Satoshi
    Uemichi, Akane
    Yamasaki, Yudai
    Kaneko, Shigehiko
    COMODIA 2017 - 9th International Conference on Modeling and Diagnostics for Advanved Engine Systems, 2017,
12345