Semiconductor piezoresistance prediction model for mechanical sensor design

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Nakanishi, Ryo [1 ]
Morikawa, Ryo [1 ]
Kawai, Masashi [1 ]
Nakahara, Takumi [1 ]
Toriyama, Toshiyuki [1 ]
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[1] College of Science and Engineering, Ritsumeikan University, Kusatsu, Japan
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