Safety and EMC compliance with fabrication equipment in semiconductor industry: Challenges and solutions

被引：0

作者：

ASM Pacific Technology Ltd., Open University of Hong Kong, Ho Man Tin, Kowloon, Hong Kong ^{[1
]}

不详 ^{[2
]}

不详 ^{[3
]}

机构：

来源：

IEEE Symp. Prod. Compliance Eng., SPCE Austin | 2019年

关键词：

D O I：

8950802

中图分类号：

学科分类号：

摘要：

Internet of things

引用

共 50 条

[41] The rise of oligopoly in the semiconductor equipment industry and its influences
Tsuji, S
[J]. Fifth International Workshop on Junction Technology, 2005, : 1 - 1
[42] SAFETY OF TRANSPORT EQUIPMENT USE IN THE METALLURGICAL INDUSTRY
KARNAUKH, NN
BRINZA, VN
[J]. METALLURGIST, 1979, 23 (11-1) : 869 - 871
[43] Time Synchronization Successes and Challenges in the Semiconductor Industry
Author, Gino Crispieri
[J]. 2008 IEEE INTERNATIONAL SYMPOSIUM ON PRECISION CLOCK SYNCHRONIZATION FOR MEASUREMENT, CONTROL AND COMMUNICATION, 2008, : 83 - 86
[44] Challenges for materials and device characterization in the semiconductor industry
Shaffner, TJ
[J]. RESONANCE IONIZATION SPECTROSCOPY 1996 - EIGHTH INTERNATIONAL SYMPOSIUM, 1997, (388): : 133 - 138
[45] Aumund Group equipment and solutions in the cement industry
[J]. Spättmann, Christian, 1600, Bauverlag BV GmbH (70): : 1 - 2
[46] Aumund Group equipment and solutions in the cement industry
Spaettmann, Christian
[J]. ZKG INTERNATIONAL, 2017, 70 (1-2): : 50 - 59
[47] Impact of integrating equipment health in production scheduling for semiconductor fabrication
Kao, Yu-Ting
Dauzere-Peres, Stephane
Blue, Jakey
Chang, Shi-Chung
[J]. COMPUTERS & INDUSTRIAL ENGINEERING, 2018, 120 : 450 - 459
[48] Deadlock-free scheduling of photolithography equipment in semiconductor fabrication
Yoon, HJ
Lee, DY
[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2004, 17 (01) : 42 - 54
[49] Challenges in Safety and Compliance Assessment in Wireless Power Transfer Applications using Numerical Analysis: Guidelines and Solutions
Barretto, Elaine C. S.
Chavannes, Nicolas
Douglas, Mark
[J]. 2016 10TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2016,
[50] Challenges with meeting regulatory compliance in the oil sands industry
Department of Civil and Environmental Engineering, University of Alberta, Edmonton, Canada
[J]. Geotech News, 2012, 1 (36-39):

← 1 2 3 4 5 →