Effects of substrate temperature on the structural and electrical properties of indium tin oxide films

被引：0
|
作者：
Liu, Jing [1 ]
Li, Xiurong [1 ]
Li, Changzhen [1 ]
机构：
[1] Glass and Specialty Fiberglass Inst, China Building Material Acad, Beijing, China
来源：
Kuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society | 2000年 / 28卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：251 / 254
相关论文
共 50 条
  • [1] Effect of substrate temperature on the structural, optical and electrical properties of Tin Oxide thin films
    Jayaprakash, R. N.
    Mariappan, R.
    [J]. CHALCOGENIDE LETTERS, 2021, 18 (04): : 191 - 200
  • [2] Effects of substrate temperature on the properties of the indium tin oxide thin films deposited by sputtering method
    Wu, Chia-Ching
    Diao, Chien-Chen
    [J]. 2018 3RD INTERNATIONAL CONFERENCE ON PRECISION MACHINERY AND MANUFACTURING TECHNOLOGY (ICPMMT 2018), 2018, 185
  • [3] Influence of substrate temperature on the properties of laser ablated indium tin oxide films
    Beena, D.
    Lethy, K. J.
    Vinodkumar, R.
    MahadevanPillai, V. P.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2007, 91 (15-16) : 1438 - 1443
  • [4] Effects of air annealing on the optical, electrical, and structural properties of indium-tin oxide thin films
    Trejo-Cruz, C.
    Mendoza-Galvan, A.
    Lopez-Beltran, A. M.
    Gracia-Jimenez, M.
    [J]. THIN SOLID FILMS, 2009, 517 (16) : 4615 - 4620
  • [5] The effect of deposition rate on electrical, optical and structural properties of tin-doped indium oxide (ITO) films on glass at low substrate temperature
    Fallah, HR
    Ghasemi, M
    Hassanzadeh, A
    Steki, H
    [J]. PHYSICA B-CONDENSED MATTER, 2006, 373 (02) : 274 - 279
  • [6] Effects of the Plasma Treatment on the Electrical Properties of Indium Tin Oxide Thin Films
    Lee, S. G.
    Park, J. Y.
    Lee, S. M.
    Sohn, S. H.
    [J]. MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2009, 513 : 277 - 284
  • [7] Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by RPD at room temperature
    Shi, Jianhua
    Shen, Leilei
    Meng, Fanying
    Liu, Zhengxin
    [J]. MATERIALS LETTERS, 2016, 182 : 32 - 35
  • [8] Electrical and structural properties of tin-doped indium oxide films deposited by DC sputtering at room temperature
    Song, PK
    Shigesato, Y
    Kamei, M
    Yasui, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5A): : 2921 - 2927
  • [9] ELECTRICAL AND OPTICAL-PROPERTIES OF REACTIVELY EVAPORATED INDIUM TIN OXIDE (ITO) FILMS - DEPENDENCE ON SUBSTRATE-TEMPERATURE AND TIN CONCENTRATION
    BALASUBRAMANIAN, N
    SUBRAHMANYAM, A
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (01) : 206 - 209
  • [10] Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition
    Izumi, H
    Adurodija, FO
    Kaneyoshi, T
    Ishihara, T
    Yoshioka, H
    Motoyama, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) : 1213 - 1218
12345