Properties and application of indium-tin-oxide coatings deposited by energy filtering magnetron sputtering at room temperature

被引：0
|
作者：
Zhang, Qingqing [1 ]
Wang, Zhaoyong [1 ,2 ]
Cheng, Zuhua [1 ]
Han, Changbao [1 ]
Yao, Ning [1 ]
机构：
[1] School of Physical Engineering and Laboratory of Physics of Zhengzhou University, Materials Physics Key Laboratory of the Ministry of Education, Zhengzhou, China
[2] Schoolof Mathematics and Physics, Henan Urban Construction University, Pingdingshan, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 01期
关键词：
D O I：
10.13922/j.cnki.cjovst.2015.01.04
中图分类号：
学科分类号：
摘要：
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页码：18 / 22
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