Preparation and wear resistance of TiBC, TiBN, SiNx single layer film and TiBC-SiNx and TiBN-SiNx double layer film by thermal plasma CVD

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作者：
Graduate School of Engineering, Hokkaido University, Kita-13 Nishi-8, Kita-ku, Sapporo 060-8628, Japan [1 ]
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来源：
Funtai Oyobi Fummatsu Yakin | 2007年 / 4卷 / 287-293期
关键词：
Thin films;
D O I：
10.2497/jjspm.54.287
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页码：287 / 293
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