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- [36] A modular fabrication process for thin-film lithium niobate modulators with silicon photonics JOURNAL OF PHYSICS-PHOTONICS, 2022, 4 (02):
- [40] Investigation of highly c-axis oriented AIN thin film re-growth MATERIALS, INTEGRATION AND PACKAGING ISSUES FOR HIGH-FREQUENCY DEVICES, 2004, 783 : 133 - 138