共 50 条
- [11] A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure 2019 14TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019), 2019, : 477 - 481
- [12] Vibrating beam accelerometer with hard suspension beams TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
- [15] INTRODUCTION OF QUARTZ VIBRATING BEAM ACCELEROMETER TECHNOLOGY PROVIDING CAPABILITY FOR LOW-COST, FULLY DIGITAL NAVIGATION SYMPOSIUM : GYRO TECHNOLOGY 1989, 1989, : 267 - 299
- [16] Nonlinear characteristics of silicon resonant accelerometer with vibrating beam integrated with comb fingers structure Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 28 (05): : 1066 - 1074
- [17] A vibrating beam MEMS accelerometer for gravity and seismic measurements Scientific Reports, 10
- [19] Studies on Static Temperature Compensation for Vibrating Beam Accelerometer MECHANICAL MATERIALS AND MANUFACTURING ENGINEERING III, 2014, 455 : 298 - 303
- [20] A NAVIGATION-GRADE MEMS VIBRATING BEAM ACCELEROMETER 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 2022, : 782 - 785