High position resolution MEMS Fabry-Perot tunable filter with dual electrodes electrostatic actuator

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机构：
[1] [1,Hirokubo, Nozomu
[2] Komatsu, Hiroshi
[3] Hashimoto, Nobuaki
[4] Sonehara, Makoto
[5] Sato, Toshiro
来源：
Hirokubo, N. | 1600年 / Institute of Electrical Engineers of Japan卷 / 133期
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D O I：
10.1541/ieejsmas.133.54
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