Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

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Institute for Molecular Engineering, University of Chicago, Chicago [1 ]
IL
60637, United States
不详 [2 ]
IL
60439, United States
不详 [3 ]
B-3001, Belgium
不详 [4 ]
IL
60439, United States
不详 [5 ]
IL
60439, United States
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J. Appl. Crystallog. | / 823-834期
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页码：823 / 834
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