DRIE for MEMS devices

被引：0
|
作者：
Puech, Michel [1 ,2 ]
Thevenoud, Jean-Marc [1 ,2 ]
Gruffat, Jean-Marc [1 ,2 ]
机构：
[1] Alcatel Micromachining Systems
[2] Alcatel Micromachining Systems, 198, Avenue de Brogny, 74009 Annecy Cedex, France
来源：
Advanced Packaging | 2008年 / 17卷 / 03期
关键词：
MEMS;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：25 / 26
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