Plasma-assisted adhesion improvement of various materials used for power device packaging

被引:0
|
作者
Tajima S. [1 ]
机构
[1] Plasma Nanotechnology Research Center, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Aichi
基金
美国国家科学基金会;
关键词
D O I
10.5104/jiep.19.111
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:111 / 119
页数:8
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