Preliminary investigation of a sacrificial process for fabrication of polymer membranes with sub-micron thickness

被引：0
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作者：
SUNY College of Nanoscale Science and Engineering, Albany [1 ]
NY, United States
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来源：
J. Fluid Mech. |
关键词：
Alkaline solutions - Conventional photolithography - Lithographies (deposition) - Mold fabrication - Molding process - Polymer membrane - Spatial features - Support structures;
D O I：
10.1557/opl.2014.69
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