Fabrication of micro accelerometer using screen printed bati03 film on a ceramic substrate and its characterization

被引：0

作者：

Suzuki, Masato ^{[1
]}

Kobayashi, Yuta ^{[1
]}

Aoyagi, Seiji ^{[1
]}

Tajiri, Hiroyuki ^{[2
]}

Nagahata, Takaya ^{[2
]}

机构：

[1] Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan

[2] Rohm CO., LTD., 21, Saiin Mizosaki-cho, Ukyo-ku, Kyoto 615-8585, Japan

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D O I：

10.1541/ieejsmas.129.295

中图分类号：

学科分类号：

摘要：

引用

页码：295 / 300

共 22 条

[21] Preparation of Bi4Ti3O12 thin film on Si(100) substrate using Bi2SiO5 buffer layer and its electric characterization
Kijima, T
Matsunaga, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (9B): : 5171 - 5173
[22] Preparation of Bi4Ti3O12 thin film on Si(100) substrate using Bi2SiO5 buffer layer and its electric characterization
Kijima, Takeshi
Matsunaga, Hironori
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (9 B): : 5171 - 5173