Fabrication of micro accelerometer using screen printed bati03 film on a ceramic substrate and its characterization

被引：0
|
作者：
Suzuki, Masato [1 ]
Kobayashi, Yuta [1 ]
Aoyagi, Seiji [1 ]
Tajiri, Hiroyuki [2 ]
Nagahata, Takaya [2 ]
机构：
[1] Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan
[2] Rohm CO., LTD., 21, Saiin Mizosaki-cho, Ukyo-ku, Kyoto 615-8585, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2009年 / 129卷 / 09期
关键词：
D O I：
10.1541/ieejsmas.129.295
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学科分类号：
摘要：
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页码：295 / 300
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