Machine learning assisted calibration of PVT simulations for SiC crystal growth

被引:0
|
作者
Taucher, Lorenz [1 ]
Ramadan, Zaher [1 ]
Hammer, Rene [2 ]
Obermuller, Thomas [2 ]
Auer, Peter [3 ]
Romaner, Lorenz [1 ]
机构
[1] Christian Doppler Laboratory of Advanced Computational Design of Crystal Growth, Department of Materials Science, Montanuniversität Leoben, Leoben,8700, Austria
[2] EEMCO GmbH, Ebner-Platz 1, Leonding,4060, Austria
[3] Chair for Information Technology, Montanuniversität Leoben, Leoben,8700, Austria
关键词
D O I
10.1039/d4ce00866a
中图分类号
学科分类号
摘要
59
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页码:6322 / 6335
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