Determination of optical constants in DUV/VUV

被引：0
|
作者：
Guo, Chun [1 ,2 ]
Kong, Mingdong [1 ]
Lin, Dawei [1 ]
Liu, Cunding [1 ]
Gao, Weidong [1 ]
Li, Bincheng [1 ]
机构：
[1] Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
[2] University of Chinese Academy of Sciences, Beijing 100039, China
来源：
Chinese Optics Letters | 2013年 / 11卷 / SUPPL.1期
关键词：
D O I：
10.3788/COL201311.S10607
中图分类号：
学科分类号：
摘要：
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