Determination of optical constants in DUV/VUV

被引：0
|
作者：
Guo, Chun [1 ,2 ]
Kong, Mingdong [1 ]
Lin, Dawei [1 ]
Liu, Cunding [1 ]
Gao, Weidong [1 ]
Li, Bincheng [1 ]
机构：
[1] Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
[2] University of Chinese Academy of Sciences, Beijing 100039, China
来源：
Chinese Optics Letters | 2013年 / 11卷 / SUPPL.1期
关键词：
D O I：
10.3788/COL201311.S10607
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Characterization of DUV and VUV optical components
    Mann, K
    Eckert, G
    Görling, C
    Leinhos, U
    Schäfer, B
    OPTICAL MICROLITHOGRAPHY XV, PTS 1 AND 2, 2002, 4691 : 1742 - 1752
  • [2] Surface characterization of optical components for the DUV, VUV and EUV
    Duparré, A
    Kozhevnikov, I
    Gliech, S
    Steinert, J
    Notni, G
    MICROELECTRONIC ENGINEERING, 2001, 57-8 : 65 - 70
  • [3] Optical constants of fluoride films in the DUV range
    Xue Chun-Rong
    Yi Kui
    Qi Hong-Ji
    Shao Jian-Da
    Fan Zheng-Xiu
    ACTA PHYSICA SINICA, 2009, 58 (07) : 5035 - 5040
  • [4] Optical design forms for DUV&VUV microlithographic processes
    Webb, J
    Bentley, J
    Michaloski, P
    Phillips, A
    Tienvieri, T
    OPTICAL MICROLITHOGRAPHY XIV, PTS 1 AND 2, 2001, 4346 : 566 - 576
  • [5] DUV/VUV light scattering measurement of optical components for lithography applications
    Gliech, S
    Steinert, J
    Flemming, M
    Duparré, A
    OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES, 2000, 4099 : 74 - 81
  • [6] Bulk absorption measurements of highly transparent DUV/VUV optical materials
    Mühlig, C
    Kufert, S
    Triebel, W
    Coriand, F
    Parthier, L
    Voitsch, A
    OPTICAL METROLOGY IN PRODUCTION ENGINEERING, 2004, 5457 : 701 - 712
  • [7] Total scatter losses of optical components in the DUV/VUV spectral range
    Kadkhoda, P
    Müller, A
    Ristau, D
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1999, 2000, 3902 : 118 - 127
  • [8] Optical constants of DUV/UV fluoride thin films
    薛春荣
    易葵
    魏朝阳
    邵建达
    范正修
    ChineseOpticsLetters, 2009, 7 (05) : 449 - 451
  • [9] Optical constants of DUV/UV fluoride thin films
    Xue, Chunrong
    Yi, Kui
    Wei, Chaoyang
    Shao, Jianda
    Fan, Zhengxiu
    CHINESE OPTICS LETTERS, 2009, 7 (05) : 449 - 451
  • [10] Total scatter measurements in the DUV VUV
    Kadkhoda, P
    Ristau, D
    von Alvensleben, F
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1998, 1999, 3578 : 544 - 554
12345