Thin film depth profiling analysis on ZnO/Si grown by O+-assisted PLD

被引：0
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作者：
Li, Geng-Wei [1 ]
Wu, Zheng-Long [2 ]
Shao, Su-Zhen [3 ]
Liu, Zhi-Kai [4 ]
机构：
[1] School of Materials Science and Technology, China University of Geosciences, Beijing 100083, China
[2] Analytical and Testing Center, Beijing Normal University, Beijing 100875, China
[3] Beijing No.47 Middle School, Beijing 100090, China
[4] Laboratory of Semiconductor Materials Science, Chinese Academy of Sciences, Beijing 100083, China
来源：
Cailiao Kexue yu Gongyi/Material Science and Technology | 2007年 / 15卷 / 05期
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页码：685 / 688
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