High-rate deposition of protective coatings with a microwave plasma

被引：0
|
作者：
Merli, Stefan [1 ]
Schulz, Andreas [1 ]
Walker, Matthias [1 ]
Tovar, Günter [1 ]
机构：
[1] Institut Für Grenzflächcnvcrfahrenstechnik UnS Plasmatechnologie, Univcrsität Stuttgart, Germany
来源：
Galvanotechnik | 2018年 / 109卷 / 07期
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页码：1426 / 1433
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