Modeling analysis and error correction of dynamic angle measurement based on grating shear interferometry

被引:0
|
作者
Li, Xiaohui [1 ,2 ,3 ]
Xu, Yongsen [1 ,3 ]
Gao, Wei [1 ,2 ,3 ]
Yu, Xiao [1 ,3 ]
Shen, Honghai [1 ,3 ]
Cheng, Yanping [1 ,3 ]
Yang, Ce [4 ]
Liu, Zewen [4 ]
Zhang, Linxia [4 ]
机构
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun,130033, China
[2] University of Chinese Academy of Sciences, Beijing,100049, China
[3] State Key Laboratory of Dynamic Optical Imaging and Measurement, Chinese Academy of Sciences, Changchun,130033, China
[4] Beijing Institute of Control and Electronic Technology, Beijing,100045, China
关键词
D O I
10.1364/OE.537742
中图分类号
学科分类号
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页码:42826 / 42845
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