Low energy ion beam assisted deposition of Cu, Ag and Pt thin films

被引：0
|
作者：
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Acad. of Sci., Shanghai 200050, China [1 ]
不详 [2 ]
机构：
来源：
He Jishu | 2008年 / 1卷 / 10-14期
关键词：
17;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：10 / 14
相关论文
共 50 条
  • [41] Ion-Beam-Assisted Deposition of Mo Thin Films for TES Applications
    Morgan, Kelsey
    Jaeckel, Felix T.
    Kripps, Kari Lynn
    McCammon, Dan
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2015, 25 (03)
  • [42] Aluminium nitride thin films prepared by ion beam assisted deposition method
    Watanabe, Y
    SURFACE MODIFICATION TECHNOLOGIES XI, 1998, : 814 - 825
  • [43] On the role of laminate architecture in thin films synthesized by ion beam assisted deposition
    Wang, X
    Kolitsch, A
    Mueklich, A
    Prokert, F
    Moeller, W
    JOURNAL OF MATERIALS SCIENCE LETTERS, 2000, 19 (06) : 485 - 487
  • [44] DEPOSITION OF BORON-NITRIDE THIN-FILMS BY ION-BEAM ASSISTED DEPOSITION
    BRICAULT, RJ
    SIOSHANSI, P
    BUNKER, SN
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 586 - 587
  • [45] Mechanical characterisation of titanium nitride films formed by low-energy ion beam assisted deposition
    Koniger, A
    Gerlach, JW
    Wengenmair, H
    Hammerl, C
    Hartmann, J
    Rauschenbach, B
    SURFACE & COATINGS TECHNOLOGY, 1996, 84 (1-3): : 439 - 442
  • [46] Charge assisted deposition of polycrystalline silicon thin films by cesium sputter ion beam deposition
    Baik, H.K. (thinfilm@yonsei.uc.kr), 1600, Japan Society of Applied Physics (43):
  • [47] Charge assisted deposition of polycrystalline silicon thin films by cesium sputter ion beam deposition
    Lee, DY
    Kim, YH
    Kim, IK
    Choi, DJ
    Jeong, SM
    Koo, WH
    Lee, SM
    Baik, HK
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (10): : 6880 - 6883
  • [48] Bactericidal and biocompatible properties of TiN/Ag multilayered films by ion beam assisted deposition
    Zhao, J.
    Cai, X. M.
    Tang, H. Q.
    Liu, T.
    Gu, H. Q.
    Cui, R. Z.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 2009, 20 : 101 - 105
  • [49] Bactericidal and biocompatible properties of TiN/Ag multilayered films by ion beam assisted deposition
    J. Zhao
    X. M. Cai
    H. Q. Tang
    T. Liu
    H. Q. Gu
    R. Z. Cui
    Journal of Materials Science: Materials in Medicine, 2009, 20 : 101 - 105
  • [50] Ion beam assisted deposition of CoPt films
    Sharma, N
    Casey, SM
    Jones, GA
    Grundy, PJ
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1999, 193 (1-3) : 93 - 96
12345