Numerical simulation research on scattering light imaging of surface defects of optical components

被引：0
|
作者：
Wang, Shitong [1 ]
Yang, Yongying [1 ]
Zhao, Limin [1 ]
Chai, Huiting [1 ]
Liu, Dong [1 ]
Bai, Jian [1 ]
Shen, Yibing [1 ]
机构：
[1] State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou,Zhejiang,310027, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 07期
关键词：
D O I：
10.3788/CJL201542.0708005
中图分类号：
学科分类号：
摘要：
20
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