Numerical simulation research on scattering light imaging of surface defects of optical components

被引:0
|
作者
Wang, Shitong [1 ]
Yang, Yongying [1 ]
Zhao, Limin [1 ]
Chai, Huiting [1 ]
Liu, Dong [1 ]
Bai, Jian [1 ]
Shen, Yibing [1 ]
机构
[1] State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou,Zhejiang,310027, China
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D O I
10.3788/CJL201542.0708005
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20
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