Gas mixture analysis and vacuum measurement using a CMOS micromachined optical Pirani gauge

被引：0
|
作者：
Brown, Keith B. [1 ]
Ma, Yuan [1 ]
Lawson, Ron P.W. [1 ]
Allegretto, Walter [1 ]
Vermeulen, Fred E. [1 ]
Robinson, Alexander M. [1 ]
机构：
[1] Dept. of Elec. and Comp. Engineering, University of Alberta, Edmonton, Alta. T6G 2G7, Canada
来源：
Canadian Journal of Electrical and Computer Engineering | 2002年 / 27卷 / 01期
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摘要：
Radiators
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页码：27 / 31
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