共 50 条
- [31] A NOVEL HIGH PERFORMANCE PIEZOELECTRICALLY DRIVEN MICROLENS ACTUATOR FOR MICRO-OPTICS APPLICATIONS 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 1487 - 1490
- [32] Model Aggregation for Virtual Metrology in High-Volume Manufacturing METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII, 2024, 12955
- [33] High-Volume Manufacturing Device Overlay Process Control METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXI, 2017, 10145
- [35] EUV patterning improvement toward high-volume manufacturing EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VI, 2015, 9422
- [38] High-speed I/O tests in high-volume manufacturing 2006 IEEE International Test Conference, Vols 1 and 2, 2006, : 1087 - 1088
- [39] High-speed I/O tests in high-volume manufacturing 2006 IEEE INTERNATIONAL TEST CONFERENCE, VOLS 1 AND 2, 2006, : 1085 - +
- [40] Efficient beamshaping of high-power diode-lasers using micro-optics GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 134 - 141