Mechanical properties measurement of materials and devices at micro- and nano-scale by optical methods: A review

被引：0

作者：

Liu, Mengxiong ^{[1
]}

Li, Xide ^{[1
]}

机构：

[1] Department of Engineering Mechanics, Center for Nano and Micro Mechanics, and Applied Mechanics Lab, Tsinghua University, Beijing,100084, China

来源：

Optics and Lasers in Engineering | 2022年 / 150卷

基金：

中国国家自然科学基金;

关键词：

Scanning electron microscopy;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

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[1] Mechanical properties measurement of materials and devices at micro- and nano-scale by optical methods: A review
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