Chemistry of ruthenium as an electrode for metal–insulator–metal capacitor application

被引：0
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作者：
Jung, Eui Young [1 ]
Bang, Jeongil [2 ]
Hwang, Ji Hyeon [1 ,3 ]
Han, Dong Hee [1 ]
Kim, Youngjin [3 ]
Kim, Haeryong [2 ]
Jeon, Woojin [1 ]
机构：
[1] Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi,17104, Korea, Republic of
[2] Inorganic Material Laboratory, Device and System Research Center, Samsung Advanced Institute of Technology, Suwon,Gyeonggi,16678, Korea, Republic of
[3] Soft Hybrid Materials Research Center, Korea Institute of Science and Technology, Seoul,02792, Korea, Republic of
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Nanotechnology | 2021年 / 32卷 / 04期
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