Properties of TiZrN thin Film Formed by Arc Ion Plating Method using Ti-Zr Alloy Target

被引：0
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作者：
Jeong, Woon-Jo [1 ]
机构：
[1] Dept. of Information & Communication Technology Convergence, Chosun College of Science & Technology, Korea, Republic of
来源：
Transactions of the Korean Institute of Electrical Engineers | 2022年 / 71卷 / 07期
关键词：
531 Metallurgy and Metallography - 534.1 Foundries - 542.3 Titanium and Alloys - 549.3 Others; including Bismuth; Boron; Cadmium; Cobalt; Mercury; Niobium; Selenium; Silicon; Tellurium and Zirconium - 633 Vacuum Technology - 633.1 Vacuum Applications - 951 Materials Science;
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摘要：
13
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页码：987 / 992
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