Microprocessing Using X-Ray Lithography in NewSUBARU

被引：0
|
作者：
Amano S. [1 ]
机构：
[1] LASTI, University of HYOGO, 3-1-2 Koto, Kamigori, Hyogo, Ako
来源：
Journal of Japan Institute of Electronics Packaging | 2023年 / 26卷 / 05期
关键词：
D O I：
10.5104/JIEP.26.483
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：483 / 487
页数：4
相关论文
共 50 条
  • [1] Fabrication of X-Ray Gratings Using X-Ray Lithography Technique for X-Ray Talbot Interferometer
    Noda, Daiji
    Tsujii, Hiroshi
    Takahashi, Naoki
    Hattori, Tadashi
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (05) : H299 - H302
  • [2] X-RAY LITHOGRAPHY
    SULLIVAN, PA
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 276 - 276
  • [3] X-RAY LITHOGRAPHY
    FEDER, R
    SPILLER, E
    TOPALIAN, J
    POLYMER ENGINEERING AND SCIENCE, 1977, 17 (06): : 385 - 389
  • [4] X-RAY LITHOGRAPHY
    SMITH, HI
    FLANDERS, DC
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 : 61 - 65
  • [5] Reflective x-ray masks for x-ray lithography
    Chumak, V. S.
    Peredkov, S.
    Devizenko, A. Yu
    Kopylets, I. A.
    Pershyn, Yu P.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2024, 34 (04)
  • [6] Microprocessing using soft X-ray from laser produced xe plasma
    Amano, Sho
    Inoue, Tomoaki
    Miyamoto, Shuji
    IEEJ Transactions on Electronics, Information and Systems, 2014, 134 (04) : 489 - 494
  • [7] Study on Fabrication of X-ray Collimators by X-ray Lithography Using Synchrotron Radiation
    Saegusa, Shunya
    Narukage, Noriyuki
    Utsumi, Yuichi
    Yamaguchi, Akinobu
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2021, 34 (02) : 213 - 218
  • [8] Coherent x-ray generation by NewSUBARU, synchrotron radiation facility
    Miyamoto, S
    Ikeda, N
    Amano, S
    Mochizuki, T
    X-RAY LASERS 1998, 1999, 159 : 557 - 560
  • [9] Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube
    Pinzek, Simon
    Beckenbach, Thomas
    Viermetz, Manuel
    Meyer, Pascal
    Gustschin, Alex
    Andrejewski, Jana
    Gustschin, Nikolai
    Herzen, Julia
    Schulz, Joachim
    Pfeiffer, Franz
    JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, 2021, 20 (04):
  • [10] Nanometer X-ray lithography
    Hartley, FT
    Malek, CK
    DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS, 1999, 3892 : 69 - 79
12345