Application Research Progress of High Power Impulse Magnetron Sputtering in the Preparation of Metal Nitrides Coatings

被引：0
|
作者：
Wei Y. [1 ]
Gu Y. [1 ]
Jiang Z. [1 ]
机构：
[1] School of Aerospace Engineering, Zhengzhou University of Aeronautics, Zhengzhou
来源：
Zhongguo Biaomian Gongcheng/China Surface Engineering | 2022年 / 35卷 / 05期
基金：
中国国家自然科学基金;
关键词：
corrosion resistance; hard coating; high power impulse magnetron sputtering (HiPIMS); high temperature oxidation resistance; tribological and wear behavior;
D O I：
10.11933/j.issn.1007-9289.20220117001
中图分类号：
学科分类号：
摘要：
As one of the most popular physical vapor deposition methods, high power impulse magnetron sputtering has been used for the preparation of hard coatings, biological coatings, corrosion-resistant coatings, high-temperature oxidation-resistant coatings, insulating coatings and other types of coatings on substrates such as tool materials, stainless steel, polymers, composite materials, etc. By high power impulse magnetron sputtering and combined method, subsequent heat treatment, the pulse frequency, peak power, duty cycle, multiple pulses and bipolarity of high power impulse magnetron sputtering to optimize and model the process to achieve the adjustment of plasma parameters such as target ionization, plasma spatial distribution, coating deposition rate, and coating phase structure such as phase structure, microstructure, element ratio, internal stress to improve the comprehensive application performance of the substrate material such as hardness, wear resistance, corrosion resistance, high temperature oxidation resistance and biocompatibility. In particular, HiPIMS has great engineering applications in the preparation and performance research of metal nitride coatings. In the context of the current application status of hard coating materials, the characteristics and technical advantages of coatings deposited by high power impulse sputtering technology are discussed. The research progress in the application of high power impulse magnetron sputtering technology such as processes in the preparation and performance of monolayers, multiple elements and multi-layers, nano-multilayers with multiple element composite, high entropy alloys and containing Si, O and C metal nitride hard coatings over the past more than 20 years are presented. © 2022 Chinese Mechanical Engineering Society. All rights reserved.
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页码：70 / 92
页数：22
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