Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure

被引：0

作者：

刘新坤 ^{[1
]}

徐金洲 ^{[1
]}

崔桐菲 ^{[1
]}

郭颖 ^{[1
,2
]}

张菁 ^{[1
,2
]}

石建军 ^{[1
,2
]}

机构：

[1] School of Science, Donghua University

[2] Magnetic Confinement Fusion Research Center, Ministry of Education of the People's Republic of

来源：

Plasma Science and Technology. | 2013年 / 15卷 / 07期

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摘要：

A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64±4 cm 1 Torr 1 , which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap.

引用

页数：4

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