Optical design and analysis of a high-speed triple galvanometer laser 3D scanning system

被引：0

作者：

Liu, Yi ^{[1
]}

Chen, Tianting ^{[1
]}

Qiao, Yaqing ^{[1
]}

Ding, Yuhang ^{[1
]}

Dan, Ziqiang ^{[2
]}

Lu, Wangrong ^{[1
]}

Ma, Haoran ^{[1
]}

Yang, Guiyang ^{[1
]}

Zhang, Chenfei ^{[3
]}

Xiong, Wei ^{[1
]}

Deng, Leimin ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei, Peoples R China

[2] Harbin Inst Technol, Key Lab Sci & Technol Tunable Laser, Harbin 150006, Heilongjiang, Peoples R China

[3] Medtronic Inc, 2343 W Medtron Way, Tempe, AZ 85281 USA

来源：

OPTICS AND LASER TECHNOLOGY | 2025年 / 181卷

基金：

中国博士后科学基金;

关键词：

Laser scanning; Dynamic focus; 3D Scanning range; Optical design; LIQUID LENS;

D O I：

10.1016/j.optlastec.2024.111608

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, a triple galvanometer laser three-dimensions (3D) scanning system (TGLSS) was proposed. The system consisted of three galvanometers and two parabolic mirrors, with rapid movement of the laser focus in 3D space by rotations of the three galvanometers. The optical principle of the TGLSS was analyzed, and the method of designing TGLSS by geometrical optics and Abbe's sine condition was given in detail. Scanning range and focusing quality were analyzed by optical simulations. An experiment was carried out to verify the feasibility of TGLSS. The implications of TGLSS for reflective dynamic focusing device (RDFD)-based laser system and their impact on technologically relevant applications were discussed. The great potential for enhancing the speed of advanced laser processing in 3D space was offered by TGLSS.

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页数：7

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