The 4D Camera: An 87 kHz Direct Electron Detector for Scanning/Transmission Electron Microscopy

被引：2

作者：

Ercius, Peter ^{[1
]}

Johnson, Ian J. ^{[2
]}

Pelz, Philipp ^{[1
]}

Savitzky, Benjamin H. ^{[1
]}

Hughes, Lauren ^{[1
]}

Brown, Hamish G. ^{[1
]}

Zeltmann, Steven E. ^{[3
]}

Hsu, Shang-Lin ^{[3
]}

Pedroso, Cassio C. S. ^{[4
]}

Cohen, Bruce E. ^{[4
,5
]}

Ramesh, Ramamoorthy ^{[3
,6
,7
]}

Paul, David ^{[8
]}

Joseph, John M. ^{[2
]}

Stezelberger, Thorsten ^{[2
]}

Czarnik, Cory

Lent, Matthew ^{[9
]}

Fong, Erin ^{[2
]}

Ciston, Jim ^{[1
]}

Scott, Mary C. ^{[1
,3
]}

Ophus, Colin ^{[1
]}

Minor, Andrew M. ^{[1
,3
]}

Denes, Peter ^{[1
]}

机构：

[1] Lawrence Berkeley Natl Lab, Natl Ctr Electron Microscopy Mol Foundry, Berkeley, CA 94720 USA

[2] Lawrence Berkeley Natl Lab, Div Engn, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[4] Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA

[5] Lawrence Berkeley Natl Lab, Div Mol Biophys & Integrated Bioimaging, Berkeley, CA 94720 USA

[6] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA

[7] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[8] Lawrence Berkeley Natl Lab, Natl Energy Res Sci Comp Ctr, Berkeley, CA 94720 USA

[9] Gatan Inc, Pleasanton, CA 94588 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2024年 / 30卷 / 05期

关键词：

active pixel sensor; direct electron detector; phase contrast STEM; scanning transmission electron microscopy; 4D-STEM; NANOCRYSTALS; PTYCHOGRAPHY; DISORDER; ORDER; TEM;

D O I：

10.1093/mam/ozae086

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe the development, operation, and application of the 4D Camera-a 576 by 576 pixel active pixel sensor for scanning/transmission electron microscopy which operates at 87,000 Hz. The detector generates data at similar to 480 Gbit/s which is captured by dedicated receiver computers with a parallelized software infrastructure that has been implemented to process the resulting 10-700 Gigabyte-sized raw datasets. The back illuminated detector provides the ability to detect single electron events at accelerating voltages from 30 to 300 kV. Through electron counting, the resulting sparse data sets are reduced in size by 10--300x compared to the raw data, and open-source sparsity-based processing algorithms offer rapid data analysis. The high frame rate allows for large and complex scanning diffraction experiments to be accomplished with typical scanning transmission electron microscopy scanning parameters.

引用

页码：903 / 912

页数：10

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