共 50 条
- [22] Development and characterization of 193nm ultra-thin resist process ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIX, PTS 1 AND 2, 2002, 4690 : 287 - 298
- [27] Ultra-Thin Chips for Flexible Electronics Process Technology, Characterization, Assembly and Applications 2013 IEEE INTERNATIONAL CONFERENCE OF ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2013,
- [28] Process-machine interactions and a multi-sensor fusion approach to predict surface roughness in cylindrical plunge grinding process 46TH SME NORTH AMERICAN MANUFACTURING RESEARCH CONFERENCE, NAMRC 46, 2018, 26 : 700 - 711