GaAs Microdisk Lasers with Al2O3 Passivation Selectively Grown on SOI

被引:0
|
作者
Lin, Qi [1 ]
Huang, Jie [1 ]
Xue, Ying [1 ]
Lin, Liying [4 ]
Xing, Zengshan [2 ,3 ]
Wong, Kam Sing [2 ,3 ]
Lau, Kei May [1 ,4 ]
机构
[1] Hong Kong Univ Sci & Technol, Div Emerging Interdisciplinary Areas, Kowloon, Hong Kong, Peoples R China
[2] Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Hong Kong, Peoples R China
[3] Hong Kong Univ Sci & Technol, William Mong Inst Nano Sci & Technol, Kowloon, Hong Kong, Peoples R China
[4] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China
来源
ACS PHOTONICS | 2024年 / 11卷 / 09期
关键词
Al2O3; ALD passivation; microdisk laser; selective growth; low threshold; high-temperature operation; QUANTUM-DOT MICRODISK; III-V PHOTODETECTORS; SILICON; SI;
D O I
10.1021/acsphotonics.4c00527
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The development of Si photonics requires efficient on-chip light sources to achieve low-cost and high-throughput systems. One promising approach is direct epitaxy of III-V materials on Si using selective growth, which has attracted extensive attention. The lateral aspect ratio trapping (LART) growth technique is used to monolithically integrate III-V materials with adjustable dimensions and without the need for thick transition buffer layers on Si. It also enables easy light coupling between selectively grown lasers and Si-based waveguides and provides various dimensions for diverse device fabrication. In this study, we report the characteristics of low-threshold optically pumped GaAs microdisk lasers (MDLs) on Si-on-insulator (SOI) grown by the LART technique. We investigated the effect of the Al2O3 passivation layer on the laser performance, including deposition temperature and thickness of the passivation. Under pulsed optical pumping, the MDLs exhibited room-temperature lasing with a low threshold down to 80 mu J/cm(2). The highest operating temperature of the device was 85 degrees C. Our study demonstrates the potential of GaAs LART on an SOI platform for future dense integration. The fabrication of microlasers with whispering gallery mode cavities shows that this approach can enable the development of efficient on-chip laser sources for Si photonics.
引用
收藏
页码:3578 / 3584
页数:7
相关论文
共 50 条
  • [41] Impact of Thermal Treatment on PECVD Al2O3 Passivation Layers
    Kuehnhold, S.
    Kafle, B.
    Kroely, L.
    Saint-Cast, P.
    Hofmann, M.
    Rentsch, J.
    Preu, R.
    PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2012), 2012, 27 : 273 - 279
  • [42] Effect of the native oxide on the surface passivation of Si by Al2O3
    Getz, Michael N.
    Povoli, Marco
    Monakhov, Eduard
    JOURNAL OF APPLIED PHYSICS, 2021, 129 (20)
  • [43] Effect of the native oxide on the surface passivation of Si by Al2O3
    Getz, Michael N. (michael.getz@fys.uio.no), 1600, American Institute of Physics Inc. (129):
  • [44] Silicon surface passivation by atomic layer deposited Al2O3
    Hoex, B.
    Schmidt, J.
    Pohl, P.
    van de Sanden, M. C. M.
    Kessels, W. M. M.
    JOURNAL OF APPLIED PHYSICS, 2008, 104 (04)
  • [45] Surface passivation of porous silicon by SiOx and Al2O3 films
    Liu, Xiaobing
    Xiong, Zuhong
    Shi, Xianghua
    Yuan, Shuai
    Liao, Liangsheng
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2000, 21 (01): : 38 - 43
  • [46] Characterization of Al2O3 surface passivation of silicon solar cells
    Albadri, Abdulrahman M.
    THIN SOLID FILMS, 2014, 562 : 451 - 455
  • [47] Hydrogen induced interface passivation in atomic layer deposited Al2O3 films and Al2O3/SiO2 stacks
    Li, Shizheng
    Yang, Ning
    Yuan, Xiao
    Liu, Cui
    Ye, Xiaojun
    Li, Hongbo
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2018, 83 : 171 - 174
  • [48] Activation of Al2O3 passivation layers on silicon by microwave annealing
    Ziegler, Johannes
    Otto, Martin
    Sprafke, Alexander N.
    Wehrspohn, Ralf B.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 113 (02): : 285 - 290
  • [49] Electrical and Chemical studies on Al2O3 passivation activation process
    Pawlik, M.
    Vilcot, J. P.
    Halbwax, M.
    Aureau, D.
    Etcheberry, A.
    Slaoui, A.
    Schutz-Kuchly, T.
    Cabal, R.
    ADVANCED MATERIALS AND CHARACTERIZATION TECHNIQUES FOR SOLAR CELLS II, 2014, 60 : 85 - 89
  • [50] Novel silicon surface passivation by Al2O3/ZnO/Al2O3 films deposited by thermal atomic layer deposition
    Jeong, Kwang-Seok
    Oh, Sung-Kwen
    Shin, Hong-Sik
    Yun, Ho-Jin
    Kim, Seong-Hyeon
    Lee, Ho-Ryeong
    Han, Kyu-Min
    Park, Ho-Yun
    Lee, Hi-Deok
    Lee, Ga-Won
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (04)