Centimeter scale color printing with grayscale lithography

被引:3
|
作者
Chen, Yu [1 ]
Li, Yang [1 ]
Tang, Wenhao [1 ]
Tang, Yutao [1 ]
Hu, Yue [1 ]
Hu, Zixian [1 ]
Deng, Junhong [2 ]
Cheah, Kokwai [3 ,4 ]
Li, Guixin [1 ]
机构
[1] Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen, Peoples R China
[2] Southern Univ Sci & Technol, Shenzhen Inst Quantum Sci & Engn, Shenzhen, Peoples R China
[3] Hong Kong Baptist Univ, Dept Phys, Hong Kong, Peoples R China
[4] Hong Kong Baptist Univ, Inst Adv Mat, Hong Kong, Peoples R China
来源
ADVANCED PHOTONICS NEXUS | 2022年 / 1卷 / 02期
基金
中国国家自然科学基金;
关键词
structural color; laser grayscale lithography; Fabry-Perot cavity; FILTER ARRAY; PHOTORESIST;
D O I
10.1117/1.APN.1.2.026002
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Structural color from artificial structures, due to its environmental friendliness and excellent durability, represents a route for color printing applications. Among various physical mechanisms, the Fabry-Perot (F-P) cavity effect provides a powerful way to generate vivid colors in either the reflection or transmission direction. Most of the previous F-P type color printing works rely on electron beam grayscale lithography, however, with this technique it is challenging to make large-area and low-cost devices. To circumvent this constraint, we propose to fabricate the F-P type color printing device by the laser grayscale lithography process. The F-P cavity consists of two thin silver films as mirrors and a photoresist film with a spatially variant thickness as the spacer layer. By controlling the laser exposure dose pixel by pixel, a centimeter-scale full-color printing device with a spatial resolution up to 5 mu m x 5 mu m is demonstrated. The proposed large area color printing device may have great potential in practical application areas such as color displays, hyperspectral imaging, advanced painting, and so on.
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页数:6
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